
| No. | Items | Standard Specification | |||||
| 1 | Size | 2″ | 3″ | 4″ | 6″ | 8″ | 12″ |
| 2 | Diameter mm | 50.8±0.3 | 76.2±0.3 | 100±0.5 | 150±0.5 | 200±0.5 | 300±0.5 |
| 3 | Conductivity | P or N or un-doped | |||||
| 4 | Orientation | (100), (110), (111) | |||||
| 5 | Thickness μm | 279, 381, 425, 525, 575, 625, 675, 725 or as required | |||||
| 6 | Resistivity Ω-cm | ≤0.005, 0.005-1, 1-10, 10-20, 20-100, 100-300 etc | |||||
| 7 | RRV max | 8%, 10%, 12% | |||||
| 8 | Primary Flat/Length mm | As SEMI standard or as required | |||||
| 9 | Secondary Flat/Length mm | As SEMI standard or as required | |||||
| 10 | TTV μm max | 10 | 10 | 10 | 10 | 10 | 10 |
| 11 | Bow & Warp μm max | 30 | 30 | 30 | 30 | 30 | 30 |
| 12 | Surface Finish | As-cut, L/L, P/E, P/P etc | |||||
| 13 | Packing | Foam box or cassette inside, carton box outside. | |||||
| Symbol | Si |
| Atomic Number | 14 |
| Atomic Weight | 28.09 |
| Element Category | Metalloid |
| Group, Period, Block | 14, 3, P |
| Crystal structure | Diamond |
| Color | Dark gray |
| Melting Point | 1414°C, 2577.2°F, 1687.15 K |
| Boiling Point | 3265°C, 5909°F, 3538.15 K |
| Density at 300K | 2.329 g/cm3 |
| Intrinsic resistivity | 3.2E5 Ω-cm |
| CAS Number | 7440-21-3 |
| EC Number | 231-130-8 |