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New Arrival China Gap - Epitaxial (EPI) Silicon Wafer – WMC


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No. Items Standard Specification
1 General Characteristics
1-1 Size 4″ 5″ 6″
1-2 Diameter mm 100±0.5 125±0.5 150±0.5
1-3 Orientation (100) or (111) (100) or (111) (100) or (111)
2 Epitaxial Layer Characteristics
2-1 Growth Method CVD CVD CVD
2-2 Conductivity Type P or P+, N/ or N+ P or P+, N/ or N+ P or P+, N/ or N+
2-3 Thickness μm 2.5-120 2.5-120 2.5-120
2-4 Thickness Uniformity ≤3% ≤3% ≤3%
2-5 Resistivity Ω-cm 0.1-50 0.1-50 0.1-50
2-6 Resistivity Uniformity ≤3% ≤5% -
2-7 Dislocation cm-2 <10 <10 <10
2-8 Surface Quality No chip, haze or orange peel remains, etc.
3 Handle Substrate Characteristics
3-1 Growth Method CZ CZ CZ
3-2 Conductivity Type P/N P/N P/N
3-3 Thickness μm 525-675 525-675 525-675
3-4 Thickness Uniformity max 3% 3% 3%
3-5 Resistivity Ω-cm As required As required As required
3-6 Resistivity Uniformity 5% 5% 5%
3-7 TTV μm max 10 10 10
3-8 Bow μm max 30 30 30
3-9 Warp μm max 30 30 30
3-10 EPD cm-2 max 100 100 100
3-11 Edge Profile Rounded Rounded Rounded
3-12 Surface Quality No chip, haze or orange peel remains, etc.
3-13 Back Side Finish Etched or LTO (5000±500Å)
4 Packing Cassette inside, carton box outside.

 

Symbol Si
Atomic Number 14
Atomic Weight 28.09
Element Category Metalloid
Group, Period, Block 14, 3, P
Crystal structure Diamond
Color Dark gray
Melting Point 1414°C, 2577.2°F, 1687.15 K
Boiling Point 3265°C, 5909°F, 3538.15 K
Density at 300K 2.329 g/cm3
Intrinsic resistivity 3.2E5 Ω-cm
CAS Number 7440-21-3
EC Number 231-130-8

 

  • Sample Available Upon Request
  • Safety Delivery of Goods By Courier/Air/Sea
  • COA/COC Quality Management
  • Secure & Convenient Packing
  • UN Standard Packing Available Upon Request
  • Quality Inspection Including XRD/SEM/ICP/GDMS etc
  • Full Scope of Trade Terms CPT/FOB/ CFR/CIP By Incoterms 2010
  • Flexible Payment Terms T/T D/P L/C Acceptable
  • Full Dimensional After-Sale Services
  • ISO9001:2015 Certified & Rohs/REACH Regulations Approval
  • Non-Disclosure Agreements
  • Non-Conflict Mineral Policy
  • Regular Environmental Management Review
  • Social Responsibility Fulfillment
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