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OEM Supply Silicon-On-Insulator Substrates - Silicon Carbide SiC – WMC


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No. Items Standard Specification
1 Size 2″ 3″ 4″ 6″
2 Diameter mm 50.8 0.38 76.2 0.38 100 0.5 150 0.5
3 Growth Method MOCVD MOCVD MOCVD MOCVD
4 Conductivity Type 4H-N, 6H-N, 4H-SI, 6H-SI
5 Resistivity Ω-cm 0.015-0.028; 0.02-0.1; >1E5
6 Orientation 0°±0.5°; 4.0° towards <1120>
7 Thickness μm 330±25 330±25 (350-500)±25 (350-500)±25
8 Primary Flat Location <1-100>±5° <1-100>±5° <1-100>±5° <1-100>±5°
9 Primary Flat Length mm 16±1.7 22.2±3.2 32.5±2 47.5±2.5
10 Secondary Flat Location Silicon face up: 90°, clockwise from prime flat ±5.0°
11 Secondary Flat Length mm 8±1.7 11.2±1.5 18±2 22±2.5
12 TTV μm max 15 15 15 15
13 Bow μm max 40 40 40 40
14 Warp μm max 60 60 60 60
15 Edge Exclusion mm max 1 2 3 3
16 Micropipe Density cm-2 <5, industrial; <15, lab; <50, dummy
17 Dislocation cm-2 <3000, industrial; <20000, lab; <500000, dummy
18 Surface Roughness nm max 1(Polished), 0.5 (CMP)
19 Cracks None, for industrial grade
20 Hexagonal Plates None, for industrial grade
21 Scratches ≤3mm, total length less than substrate diameter
22 Edge Chips None, for industrial grade
23 Packing Single wafer container sealed in Aluminum bag.

 

Linear Formula SiC
Molecular Weight 40.1
Crystal structure Wurtzite
Apperance Solid
Melting Point 3103±40K
Boiling Point N/A
Density at 300K 3.21 g/cm3
Energy Gap (3.00-3.23) eV
Intrinsic resistivity >1E5 Ω-cm
CAS Number 409-21-2
EC Number 206-991-8

 

  • Sample Available Upon Request
  • Safety Delivery of Goods By Courier/Air/Sea
  • COA/COC Quality Management
  • Secure & Convenient Packing
  • UN Standard Packing Available Upon Request
  • Quality Inspection Including XRD/SEM/ICP/GDMS etc
  • Full Scope of Trade Terms CPT/FOB/ CFR/CIP By Incoterms 2010
  • Flexible Payment Terms T/T D/P L/C Acceptable
  • Full Dimensional After-Sale Services
  • ISO9001:2015 Certified & Rohs/REACH Regulations Approval
  • Non-Disclosure Agreements
  • Non-Conflict Mineral Policy
  • Regular Environmental Management Review
  • Social Responsibility Fulfillment
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