
| No. | Items | Standard Specification | ||
| 1 | Size | 2″ | 3″ | 4″ |
| 2 | Diameter mm | 50.5±0.5 | 76.2±0.5 | 100±0.5 |
| 3 | Growth Method | LEC | LEC | LEC |
| 4 | Conductivity | P/Zn-doped, N/(Sn/S-doped or un-doped) | ||
| 5 | Orientation | (100)±0.5°, (111)±0.5° | ||
| 6 | Thickness μm | 500±25 | 600±25 | 800±25 |
| 7 | Orientation Flat mm | 16±2 | 22±2 | 32±2 |
| 8 | Identification Flat mm | 8±1 | 11±1 | 18±1 |
| 9 | Mobility cm2/V.s | 60-300, ≥2000 or as required | ||
| 10 | Carrier Concentration cm-3 | (3-80)E17 or ≤5E16 | ||
| 11 | TTV μm max | 10 | 10 | 10 |
| 12 | Bow μm max | 10 | 10 | 10 |
| 13 | Warp μm max | 15 | 15 | 15 |
| 14 | Dislocation Density cm-2 max | 1000 | 2000 | 5000 |
| 15 | Surface Finish | P/E, P/P | P/E, P/P | P/E, P/P |
| 16 | Packing | Single wafer container sealed in Aluminum bag. | ||
| Linear Formula | InAs |
| Molecular Weight | 189.74 |
| Crystal structure | Zinc blende |
| Apperance | Gray crystalline solid |
| Melting Point | (936-942)°C |
| Boiling Point | N/A |
| Density at 300K | 5.67 g/cm3 |
| Energy Gap | 0.354 eV |
| Intrinsic resistivity | 0.16 Ω-cm |
| CAS Number | 1303-11-3 |
| EC Number | 215-115-3 |